Effect of hydrogen on the low-temperature growth of polycrystalline silicon film deposited by SiCl4/H2-Reference-Cited by-同舟云学术

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Effect of hydrogen on the low-temperature growth of polycrystalline silicon film deposited by SiCl4/H2

Published:2006-08 Issue:1-2 Volume:513 Page:380-384
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Huang Rui,Lin Xuanying,Huang Wenyong,Yao Ruohe,Yu Yunpeng,Lin Kuixun,Wei Junhong,Zhu Zusong

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. High-speed, short-channel polycrystalline silicon thin-film transistors

2. N-side illuminated microcrystalline silicon solar cells

3. Microstructure and open-circuit voltage of n−i−p microcrystalline silicon solar cells

4. Effect of hydrogen on the photoluminescence of Si nanocrystals embedded in a SiO2 matrix

5. Effect of hydrogen dilution on the structure of amorphous silicon alloys

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Influence of Power on the Microstructure and Optical Properties of Microcrystalline Si Films;Advanced Materials Research;2014-08-28

2. Substrate Dependence of Microcrystalline Silicon Growth with SiH₄ Diluted by Ar;Advanced Materials Research;2014-06

3. Influence of Radio Frequency Power on the Structural Properties of nc-Si Films Fabricated by VHF-PECVD;Key Engineering Materials;2012-12

4. Growth characteristics of amorphous-layer-free nanocrystalline silicon films fabricated by very high frequency PECVD at 250°C;Chinese Physics B;2012-06

5. Effect of argon on the structure of hydrogenated nanocrystalline silicon deposited from tetrachlorosilane/hydrogen/argon plasma;physica status solidi (a);2012-03-07

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