Synthesis and optimization of low-pressure chemical vapor deposition-silicon nitride coatings deposited from SiHCl3 and NH3-Reference-Cited by-同舟云学术

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Synthesis and optimization of low-pressure chemical vapor deposition-silicon nitride coatings deposited from SiHCl3 and NH3

Published:2019-07 Issue: Volume:681 Page:47-57
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Cossou B.,Jacques S.,Couégnat G.,King S.W.,Li L.,Lanford W.A.,Bhattarai G.,Paquette M.,Chollon G.

Funder

Safran Ceramics

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference54 articles.

1. Semiconductor surface passivation;Meiners;Mater. Sci. Rep.,1988

2. Residual stress in low pressure chemical vapor deposition SiNx films deposited from silane and ammonia;Temple-Boyer;J. Vac. Sci. Technol. Vac. Surf. Films,1998

3. Silicon nitride films deposited from SiH2Cl2-NH3 by low pressure chemical vapor deposition: kinetics, thermodynamics, composition and structure;Zhang;Thin Solid Films,1992

4. Development and evaluation of refractory CVD coatings as contact materials for molten silicon;Duffy;J. Cryst. Growth,1980

5. Chemical vapour deposition coating of crystalline Si3N4 on a quartz crucible for nitrogen-doped Czochralski silicon crystal growth;Doi;Mater. Sci. Eng. A,1988

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study on effects of ethylene or acetylene addition on the stability of ammonia laminar diffusion flame by optical diagnostics and chemical kinetics;Applied Energy;2024-05

2. Effects of N/Si ratio on mechanical properties of amorphous silicon nitride coating;Materials Research Express;2023-11-01

3. SiC/SiC ceramic matrix composites with BN interphase produced by gas phase routes: An overview;Open Ceramics;2023-09

4. High-speed deposition of silicon nitride thick films via halide laser chemical vapor deposition;Journal of the European Ceramic Society;2023-09

5. Silicon Compound Nanomaterials: Exploring Emission Mechanisms and Photobiological Applications;Advanced Photonics Research;2023-06-02

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