Author:
Yu M.B.,Ning Jiang,Balakumar S.,Bliznetsov V.N.,Lo G.Q.,Balasubramanian N.,Kwong D.L.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. IEEE International Electron Device Meeting (IEDM'96);Burghartz,1996
2. Interconnect Technology Conference. Proceedings of the IEEE 1998 International;Edelstein,1998
3. RF inductors and capacitors integrated on silicon chip by CMOS compatible Cu interconnect technology
4. IEEE, IITC Proc.;Wu,1999
Cited by
11 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献