Tuning silicon nitride refractive index through radio-frequency sputtering power-Reference-Cited by-同舟云学术

Tuning silicon nitride refractive index through radio-frequency sputtering power

Published:2021-11 Issue: Volume:737 Page:138951
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

De Luca Daniela^ORCID,Di Gennaro Emiliano,De Maio Davide^ORCID,D’Alessandro Carmine^ORCID,Caldarelli Antonio^ORCID,Musto Marilena,Koral Can^ORCID,Andreone Antonello^ORCID,Fittipaldi Rosalba,Di Meo Valentina^ORCID,Iodice Mario,Russo Roberto^ORCID

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference28 articles.

1. Review - silicon nitride and silicon nitride-rich thin film technologies: State-of-the-art processing technologies, properties, and applications;Kaloyeros;ECS J. Solid State Sci. Technol.,2020

2. The preparation, characterization and applications of silicon nitride thin films;Morosanu;Thin Solid Films,1980

3. Silicon nitride: the engineering material of the future;Krstic;J. Mat. Sci.,2012

4. New applications of low temperature PECVD silicon nitride films for microelectronic device fabrication;Dange;Microelec. J.,1991

5. A versatile silicon-silicon nitride photonics platform for enhanced functionalities and applications;Wilmart;Appl. Sci.,2019

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1. Silicon nitride thin-films deposited by radiofrequency reactive sputtering: Refractive index optimization with substrate cooling in a nitrogen-rich atmosphere;Optical Materials;2024-03

2. Thin films of silicon nitride deposited at room temperature by non-reactive magnetron sputtering: radiofrequency power and deposition time influence on the formation of α-Si3N4 and its optical properties;Frontiers in Physics;2023-08-22

3. Broadband antireflective coatings in the optical communication band deposited by ion-assisted reactive magnetron sputtering;Infrared Physics & Technology;2023-06

4. Detailed studies on sputter-deposited Hf and HfC thin films for solar energy devices;Solar Energy Materials and Solar Cells;2023-06

5. Widely tunable refractive index silicon nitride films deposited by ion-assisted pulsed DC reactive magnetron sputtering;Optical Materials;2023-02