The effect of oxygen incorporation in sputtered scandium nitride films-Reference-Cited by-同舟云学术

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The effect of oxygen incorporation in sputtered scandium nitride films

Published:2008-10 Issue:23 Volume:516 Page:8569-8572
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Moram M.A.,Barber Z.H.,Humphreys C.J.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. Epitaxial growth and properties of semiconducting ScN

2. Structure and optical properties of ScN thin films

3. Electronic structure and optical spectra of the semimetal ScAs and of the indirect-band-gap semiconductors ScN and GdN

4. Young’s modulus, Poisson’s ratio, and residual stress and strain in (111)-oriented scandium nitride thin films on silicon

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