Estimation of needle height using relative parallax between two SIM images in single-column focused ion beam instrument-Reference-Cited by-同舟云学术

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Estimation of needle height using relative parallax between two SIM images in single-column focused ion beam instrument

Published:2021-01 Issue: Volume:67 Page:453-460
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Shichi Hiroyasu,Tsuneta Ruriko,Fukuda Muneyuki

Funder

Hitachi High-Tech, Japan

Publisher

Elsevier BV

Subject

General Engineering

Reference33 articles.

1. Focused ion beams in microfabrication;Prewett;Rev Sci Instrum,1992

2. High-resolution focused ion beams;Orloff;Rev Sci Instrum,1993

3. High resolution focused ion beams (FIB and its applications);Orloff,2003

4. Introduction to focused ion beams: instrumentation, theory, techniques and practice;Giannuzzi,2005

5. Ion and neutral spectroscopy;Briggs,1993

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