The study on precision positioning system of two-dimensional platform based on high speed and large range
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference21 articles.
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1. Precise Tilt Platform Using Position Sensitive Detector and Control Method for Tilt Angle;Acta Optica Sinica;2020
2. Identification and Modeling of Contact Dynamics of Precise Direct Drive Stages;Journal of Dynamic Systems, Measurement, and Control;2016-05-03
3. Research on model identification of ultra-precision motion stage;Optical Modeling and Performance Predictions VII;2015-09-23
4. Analysis method for investigating the influence of mechanical components on dynamic mechanical error of machine tools;Precision Engineering;2012-07
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