Contact-less revolving stage using transverse flux induction principle

Author:

Jung Kwang Suk,Lee Sang Heon

Publisher

Elsevier BV

Subject

General Engineering

Reference12 articles.

1. Atomic-scale precision motion control stage (the Angstrom stage);Holmes;Ann CIRP,1995

2. Study of a surface-motor driven precise positioning system;Tomita;J Dynamic Syst Meas Control,1995

3. The long-range scanning stage: a novel platform for scanned-probe microscopy;Holmes;Prec Eng,2000

4. Integrated planar drives and their applications;Saffert;Ann IEEE AMC 2000-Nagoya,2000

5. Closed-loop control of a base XY stage with rotational degree-of-freedom for a high-speed ultra-accurate manufacturing system;Melkote,1999

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