Erosive smoothing of abrasive slurry-jet micro-machined channels in glass, PMMA, and sintered ceramics: Experiments and roughness model-Reference-Cited by-同舟云学术

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Erosive smoothing of abrasive slurry-jet micro-machined channels in glass, PMMA, and sintered ceramics: Experiments and roughness model

Published:2017-07 Issue: Volume:49 Page:332-343
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Kowsari K.,Schwartzentruber J.,Spelt J.K.,Papini M.

Funder

Natural Sciences and Engineering Research Council of Canada

Canada Research Chairs

Nanowave Technologies

Magna International Inc.

Publisher

Elsevier BV

Subject

General Engineering

Reference30 articles.

1. Hybrid erosive jet micro-milling of sintered ceramic wafers with and without copper-filled through-holes;Kowsari;J Mater Process Technol,2016

2. Characterisation and comparison of microfluidic chips formed using abrasive jet micromachining and wet etching;Ghobeity;J. Micromech Microeng,2012

3. Powder blasting for the realization of microchips for bio-analytic applications;Solignac;Sens Actuators A,2001

4. Mechanics of adhesion in MEMS—a review;Zhao;J Adhes Sci. Technol,2003

5. Simulation of erosive smoothing in the abrasive jet micro-machining of glass;Haj Mohammad Jafar;Mater Process Technol,2013

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