1. Advancement and challenges in MOSFET scaling;Ratnesh;Mater. Sci. Semicond. Process.,2021
2. To the digital age: research labs, start-up companies, and the rise of MOS technology;Ensmenger;Isis,2006
3. 5nm CMOS production technology platform featuring full-fledged EUV, and high mobility channel FinFETs with densest 0.021μm2 SRAM cells for Mobile SoC and high performance computing applications;Yeap,2019
4. Highly manufacturable 7nm FinFET technology featuring EUV lithography for low power and high performance applications’;Ha,2017
5. A 7nm FinFET technology featuring EUV patterning and dual strained high mobility channels;Xie,2016