A theoretical analysis of the electret air-gap field-effect structure for sensor applications

Author:

Sprenkels A.J.,Voorthuyzen J.A.,Bergveld P.

Publisher

Elsevier BV

Subject

General Engineering

Reference14 articles.

1. Capacitive pressure transducers with integrated circuits

2. A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity

3. Y.E. Park and K.D. Wise, IEEE 1983 Custom Integrated Circuits Conf., Rochester NY, U.S.A., pp. 380 - 384.

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