Integrated silicon flow-direction sensor-Reference-Cited by-同舟云学术

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Integrated silicon flow-direction sensor

Published:1989-01 Issue:1-2 Volume:16 Page:109-119
ISSN:0250-6874
Container-title:Sensors and Actuators
language:en
Short-container-title:Sensors and Actuators

Author:

van Oudheusden B.W.,Huijsing J.H.

Publisher

Elsevier BV

Subject

General Engineering

Reference11 articles.

1. Flow angle and shear stress measurements using heated films and wires;McCroskey;J. Basic Eng., Trans. ASME Series D,1972

2. An integrated silicon double bridge anemometer;van Putten;Sensors and Actuators,1983

3. Monolithic integrated direction-sensitive flow sensor;Huijsing;IEEE Trans. Electron Dev., ED-29,1982

4. Performance characteristic of a single chip two dimensional flow sensor;Sekimura;Proc. 5th Sensor Symp., IEE Japan,1985

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