A novel CMOS flow sensor with constant chip temperature (CCT) operation

Author:

Qin-Yi Tong,Jin-Biao Huang

Publisher

Elsevier BV

Subject

General Engineering

Reference9 articles.

1. A CMOS process for VLSI instrumentation;Qin-Yi;Microelectron. J.,1982

2. CMOS interface technology for VLSI system integration;Qin-Yi;International Vacation School on VLSI Fabrication, Edinburgh,1984

3. Monolithic integrated direction-sensitive flow sensor;Huijing;IEEE Trans. Electron Devices, ED-29,1982

4. Monolithic integrated zinc-oxide on silicon pyroelectric anemometer;Polla;Tech. Dig. Int. Electron Device Meet.,1983

5. G. E. Plstger and M. Southfield, Solid-state fluid sensor, U.S. Patent No. 3 992 940 (Nov. 23, 1976).

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4. A flow sensor for liquids based on a single temperature sensor operated in pulsed mode;Sensors and Actuators A: Physical;2004-02

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