Set-point variation in learning schemes with applications to wafer scanners-Reference-Cited by-同舟云学术

Set-point variation in learning schemes with applications to wafer scanners

Published:2009-03 Issue:3 Volume:17 Page:345-356
ISSN:0967-0661
Container-title:Control Engineering Practice
language:en
Short-container-title:Control Engineering Practice

Author:

Heertjes Marcel F.,van de Molengraft René M.J.G.

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Computer Science Applications,Control and Systems Engineering

Reference29 articles.

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