Improving prediction selectivity for on-line near-infrared monitoring of components in etchant solution by spectral range optimization
Author:
Publisher
Elsevier BV
Subject
Spectroscopy,Environmental Chemistry,Biochemistry,Analytical Chemistry
Reference15 articles.
1. Handbook of Near-Infrared Analysis;Burns,1992
2. Near-Infrared Reflectance Analysis
3. Near-Infrared Spectroscopy for Monitoring Wafer Etchant Solution Using a Teflon Tube
4. Simple and robust near-infrared spectroscopic monitoring of indium-tin-oxide (ITO) etching solution using Teflon tubing
5. Improving the robustness of a partial least squares (PLS) model based on pure component selectivity analysis and range optimization: Case study for the analysis of an etching solution containing hydrogen peroxide
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