Comparison of near-infrared and Raman spectroscopy for on-line monitoring of etchant solutions directly through a Teflon tube
Author:
Publisher
Elsevier BV
Subject
Spectroscopy,Environmental Chemistry,Biochemistry,Analytical Chemistry
Reference11 articles.
1. Near-Infrared Spectroscopy for Monitoring Wafer Etchant Solution Using a Teflon Tube
2. Simple and robust near-infrared spectroscopic monitoring of indium-tin-oxide (ITO) etching solution using Teflon tubing
3. Improving the robustness of a partial least squares (PLS) model based on pure component selectivity analysis and range optimization: Case study for the analysis of an etching solution containing hydrogen peroxide
4. Improving prediction selectivity for on-line near-infrared monitoring of components in etchant solution by spectral range optimization
5. Simple and Reliable Raman Measurement of an Etchant Solution Directly through Teflon Tubing
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