1. Special issue;Microelectron Eng,1996
2. Handbook of microlithography, micromachining, and microfabrication;Rai-Choudhury,1997
3. LIGA and related technologies for industrial application;Mans;Sensor Actuator,1996
4. Materials of LIGA technology;Ehrfeld,1998
5. Soft lithography;Xia;Angew Chem Int Ed,1998