Beware of symmetry breaking and periodic flow regimes in axisymmetric CVD reactor setups
Author:
Publisher
Elsevier BV
Subject
Computer Science Applications,General Chemical Engineering
Reference29 articles.
1. Illuminating nonlinear dependence of film deposition rate in a CVD reactor on operating conditions;Cheimarios;Chem. Eng. J.,2012
2. Enabling a commercial computational fluid dynamics code to perform certain nonlinear analysis tasks;Cheimarios;Comput. Chem. Eng.,2011
3. Multiscale modeling in chemical vapor deposition processes: coupling reactor scale with feature scale computations;Cheimarios;Chem. Eng. Sci.,2010
4. Effect of carrier gases on the chemical vapor deposition of tungsten from WF6 - SiH4;Choi;J. Electrochem. Soc.,1993
5. Flow structure and heat transfer in a horizontal converging channel heated from below;Chiu;Phys. Fluids,2000
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