Surface Micro-Structuring of Silica Glass by Laser-induced Backside Wet Etching
Author:
Affiliation:
1. Photonics Research Institute (PRI), National Institute of Advanced Industrial Science and Technology (AIST) Tsukuba Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565
Publisher
Laser Society of Japan
Link
http://www.jstage.jst.go.jp/article/lsj/36/APLS/36_APLS_1246/_pdf
Reference74 articles.
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3. 3) P. R. Herman, R. S. Marjoribanks, A. Oettl, K. Chen, I. Konovalov, and S. Ness: Appl. Surf. Sci., 154-155 (2000) 577.
4. Novel ablation of fused quartz by preirradiation of vacuum‐ultraviolet laser beams followed by fourth harmonics irradiation of Nd:YAG laser
5. 5) H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wähmer, and E. E. B. Campbell: Appl. Phys. A 65 (1997) 367.
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