Brief History of Targets for High-Rep-Rate Laser-Plasma X-Ray Source-Focused on Approaches Using Xe Cryogenic Targets--Reference-Cited by-同舟云学术

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Brief History of Targets for High-Rep-Rate Laser-Plasma X-Ray Source-Focused on Approaches Using Xe Cryogenic Targets-

Published:2004 Issue:12 Volume:32 Page:750-756
ISSN:0387-0200
Container-title:The Review of Laser Engineering
language:en
Short-container-title:The Review of Laser Engineering

Author:

MOCHIZUKI Takayasu¹,INOUE Takahiro¹

Affiliation:

1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo

Publisher

Laser Society of Japan

Link

http://www.jstage.jst.go.jp/article/lsj/32/12/32_12_750/_pdf

Reference56 articles.

1. 1) J. A. Trail, and R. L. Byer: Proc. SPIE in Applications of Thin-Film Multilayered Structures to Figured X-Ray Optics, Vol. 563, (1985) p. 90.

2. 2) 望月孝晏:応用物理 56 (1987) 565.

3. 3) P. J. Mallozzi, H. M. Epstein, R. G. Jung, D. C. Applebaum, B. P. Fairand, and W. J. Gallagher: U. S. Patent 4058486 (Nov. 15, 1977).

4. 4) P. J. Mallozzi, H. M. Epstein, R. G. Jung, D. C. Applebaum, B. P. Fairand, W. J. Gallagher, R. L. Uecker, and M. C. Muckerheide: J. Appl. Phys. 45 (1974) 1891.

5. Submicrosecond X-ray lithography

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characteristics of Extreme Ultraviolet Emission from CO₂ Laser-Produced Plasma;IEEJ Transactions on Electronics, Information and Systems;2007

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