Author:
Niazi Sana,Doroodgar Farideh
Abstract
Modern advancement in lithographic technology, injection molding, and nano-imprinting has improved the patterning of small structures, resolution, productivity, and materials. Ultrafast laser micro/nano-manufacturing technologies, including nano- and femtosecond lasers, have the advantage of high precision as a result of suppressed heat diffusion to the surroundings. This precision imposes strict requirements on the temporal characteristics of laser pulses. Ultrafast lasers also have advantages in terms of technique, application, and processing. Femtosecond laser (FSL) uses photo disruption to form micro-cavitation bubbles within the cutting plane. The controllable spatiotemporal properties of FSL make it applicable for the three-dimensional fabrication of transparent materials. Using smart materials to create 3D microactuators and microrobots is a newfound application of FSL processing, which enables the integration of optical devices with other components and is practiced in new applications, such as 3D microfluidic, optofluidic, and electro-optic devices. We discuss mechanisms and methods of FSL (including digital micromirror devices, different processes, and interferences). Microlens arrays, micro/nanocrystals, photonic crystals, and optical fibers all have applications in the production of optical devices. Using FSLs, one may create scalable metamaterials with multiscale diameters from tens of nanometers to centimeters. The huge potential of FSL processing in various fields, such as machinery, electronics, biosensors and biomotors, physics, and chemistry, requires more research.