Reliability of Microelectromechanical Systems Devices
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Publisher
IntechOpen
Link
http://www.intechopen.com/download/pdf/67483
Reference62 articles.
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2. Van Spengen WM. MEMS reliability from a failure mechanisms perspective. Microelectronics and Reliability. 2003;43(7):1049-1060. DOI: 10.1016/S0026-2714(03)00119-7
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