Large-Area Nanoimprint Lithography and Applications
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Publisher
InTech
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http://www.intechopen.com/download/pdf/58424
Reference43 articles.
1. Verschuuren MA, Megens M, Ni Y, et al. Large area nanoimprint by substrate conformal imprint lithography (SCIL). Advanced Optical Technologies. 2017;6(3–4):243-264
2. Bläsi B, Tucher N, Höhn O, et al. Large area patterning using interference and nanoimprint lithography. Proceedings of SPIE. 2016;9888:98880H
3. Schoot JV, Schift H. Next-generation lithography—An outlook on EUV projection and nanoimprint. Advanced Optical Technologies. 2017;6(3–4):159-162
4. Lan H, Ding Y, Liu H. Nanoimprint Lithography Principles, Processes and Materials. New York, USA: Nova Science Pub Inc.; 2011
5. Dumond JJ, Low HY. Recent developments and design challenges in continuous roller micro- and nanoimprinting. Journal of Vacuum Science and Technology B. 2012;30(1):010801
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