Line-field parallel spectral domain optical coherence tomography and its application in defect inspection

Abstract

For the needs of online nondestructive testing method in glass industry, we have presented a large-range line-field parallel spectral domain optical coherence tomography system. Based on fast area scan CMOS camera, the whole cross-sectional image can be acquired by a single shot. Depth-resolved image at different lateral positions can be acquired simultaneously, without the lateral scanning mechanism. The axial resolution is 17.9 μm, the lateral resolutions in parallel direction and scanning direction are 55.7 μm and 24.8 μm, respectively. The system measurement range is 32 mm in lateral direction and 6 mm in axial direction. At 1 mm axial position, the system sensitivity can reach 62 dB at a rate of 128 000 A-scan/s. By using the present system, application in glass defect inspection has been investigated.