A novel quartz micro-structure based on shear stress detection and its gyroscopic effect

Abstract

In order to simplify sidewall electrode pattern of quartz gyroscope, a novel micro-structure used to sense Coriolis’ force based on shear stress detection is demonstrated. The approach of shear stress detection is analyzed and the structure of sidewall electrode is a single polarity electrode. A tapered beam with 15° taper designed as the sensing beam can increase its sensitivity. A prototype structure is fabricated by processing z-cut quartz by anisotropic wet etching technique. The prototype has a drive mode frequency of about 5.6 kHz, and the quality factor is over 5000 in atmosphere. The spectrum analysis of the structure’s output signal reveals the Coriolis force, which validates our new design scheme.