Author:
Petrović Z. Lj.,Jovanović J. V.,Stojanović V.,Raspopović Z. M.,Ristivojević Z.
Publisher
Springer Science and Business Media LLC
Subject
Atomic and Molecular Physics, and Optics
Reference33 articles.
1. M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Discharge and Materials Processing (Wiley Hoboken, New Jersey, 2005)
2. I. Stefanović, E. Kovacević, J. Berndt, J. Winter, New J. Phys. 5, 39.1 (2003); T. Makabe, Z. Petrović, Plasma Electronics: Applications in Microelectronic Device Fabrication Taylor and Francis (CRC Press, New York, 2006); J.P. Boeuf, Ph. Belenguer, J. Appl. Phys. 71, 4751 (1992)
3. D. Economou, Appl. Surf. Sci. 253, 6672 (2007)
4. N. Nakano, N. Shimura, Z.Lj. Petrović, T. Makabe, Phys. Rev. E 49, 4455 (1994); G.A. Curley, D. Marić, J.-P. Booth, C.S. Corr, P. Chabert, J. Guillon, Plasma Sources Sci. Technol. 16, S87 (2007); S.J. Choi, M.J. Kushner, J. Appl. Phys. 74, 853 (1993)
5. D. Pintassilgo, K. Kutasi, J. Loureiro, Plasma Sources Sci. Technol. 16, S115 (2007); R.E.J. Sladek, E. Stoffels, J. Phys. D: Appl. Phys. 38, 1716 (2005); N. Puac, Z.Lj. Petrović, G. Malović, A. Djordjević, S. Zivković, Z. Giba, D. Grubisić, J. Phys. D: Appl. Phys. 39, 3514 (2006)
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