Applying numerical control to analyze the pull-in stability of MEMS systems-Reference-Cited by-同舟云学术

Applying numerical control to analyze the pull-in stability of MEMS systems

Published:2024 Issue:3 Part A Volume:28 Page:2171-2178
ISSN:0354-9836
Container-title:Thermal Science
language:en
Short-container-title:Therm sci

Author:

Zhang Yanni¹,Han Yiman¹,Zhao Xin²,Zhao Zhen³,Pang Jing⁴

Affiliation:

1. College of Science, Liaoning University of Technology, Jinzhou, China

2. Department of Basic, Officers College of PAP, Chengdu, China

3. School of Mathematics and Statistics, Ningbo University, Ningbo, China

4. College of Science, Inner Mongolia University of Technology, Hohhot, China + Inner Mongolia Key Laboratory of Statistical Analysis Theory for Life Data and Neural Network Modeling, Inner Mongolia University of Technology, Hohhot, China

Abstract

The micro-electro-mechanical system is widely used for energy harvesting and thermal wind sensor, its efficiency and reliability depend upon the pull-in instability. This paper studies a micro-electro-mechanical system using He-Liu [34] formulation for finding its frequency-amplitude relationship. The system periodic motion, pull-in instability and pseudo-periodic motion are discussed. This paper offers a new window for security monitoring of the system reliable operation.

Publisher

National Library of Serbia

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