Improvement of surface acoustic wave characteristics of ZnO film/interdigital transducer/glass substrate using alumina film interlayer
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/53/i=9S/a=09PA08/pdf
Reference29 articles.
1. Structural, optical, and surface acoustic wave properties of epitaxial ZnO films grown on (011̄2) sapphire by metalorganic chemical vapor deposition
2. Characterization of (11\bar20) Textured ZnO Films Fabricated by RF Magnetron Sputtering
3. Optimization of zinc oxide thin film for surface acoustic wave filters by radio frequency sputtering
4. Effects of native defects on optical and electrical properties of ZnO prepared by pulsed laser deposition
5. Growth of ZnO(002) and ZnO(100) films on GaAs substrates by MOCVD
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Evaluation of SiO2 Thin films on piezoelectric substrates using line-focus-beam ultrasonic material characterization system;Japanese Journal of Applied Physics;2019-06-10
2. Propagation properties of leaky surface acoustic wave on water-loaded piezoelectric substrate;Japanese Journal of Applied Physics;2018-06-19
3. Improving the properties of zinc oxide thin-film surface acoustic wave device on glass substrate by introducing double alumina layers;Japanese Journal of Applied Physics;2017-09-11
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