Comparison of VOxthin films fabricated on fused quartz and SiO2/Si substrates by metal organic decomposition
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/53/i=7/a=075502/pdf
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1. IR microbolometer with self-supporting structure operating at room temperature
2. Properties of VO2 thin film prepared with precursor VO(acac)2
3. VO2 films with strong semiconductor to metal phase transition prepared by the precursor oxidation process
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1. Annealing temperature effect on the temperature coefficient of resistance for vanadium oxide (VOx) thin films as bolometer materials;Japanese Journal of Applied Physics;2023-03-27
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