Surface force measurement of ultraviolet nanoimprint lithography materials
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/55/i=2/a=028001/pdf
Reference12 articles.
1. Imprint of sub‐25 nm vias and trenches in polymers
2. Nanoimprint lithography
3. Mold-assisted nanolithography: A process for reliable pattern replication
4. Fabrication of double-sided self-supporting antireflection-structured film by ultraviolet nanoimprint lithography
5. Fabrication of antireflection structure film by roll-to-roll ultraviolet nanoimprint lithography
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