Sputtering deposition of Al-doped zinc oxide thin films using mixed powder targets-Reference-Cited by-同舟云学术

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Sputtering deposition of Al-doped zinc oxide thin films using mixed powder targets

Published:2015-11-13 Issue:1S Volume:55 Page:01AA08
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ohshima Tamiko,Maeda Takashi,Tanaka Yuki,Kawasaki Hiroharu,Yagyu Yoshihito,Ihara Takeshi,Suda Yoshiaki

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference29 articles.

1. Investigation into the effects of deposition parameters on TiO2 photocatalyst thin films by rf magnetron sputtering

2. Effect of deposition power in fabrication of highly efficient CdS:O/CdTe thin film solar cell by the magnetron sputtering technique

3. The effect of process parameters on the structure, photocatalytic and self-cleaning properties of TiO2 and Ag-TiO2 coatings deposited using reactive magnetron sputtering

4. Transparent conductive Mg and Ga co-doped ZnO thin films for solar cells grown by magnetron sputtering: H2 induced changes

5. Photocatalytic TiO2 thin films deposited on flexible substrates by radio frequency (RF) reactive magnetron sputtering

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Indium-gallium-zinc oxide thin-film preparation via single-step radio frequency sputter deposition using mixed-oxide powder targets;Archives of Electrical Engineering;2024-01-02

2. Preparation of Ti and Fe Composition Gradient Thin Films by Sputtering with Mixed Powder Targets;E-J SURF SCI NANOTEC;2023

3. Preparation of Ti and Fe Composition Gradient Thin Films by Sputtering with Mixed Powder Targets;e-Journal of Surface Science and Nanotechnology;2023-02-18

4. Sputtering Deposition With Low Cost Multi-Element Powder Targets;IEEE Open Journal of Nanotechnology;2023

5. Preparation of functional thin films with elemental gradient by sputtering with mixed powder targets;Japanese Journal of Applied Physics;2021-12-15

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