Enhancing the sensitivity of three-axis detectable surface acoustic wave gyroscope by using a floating thin piezoelectric membrane
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/56/i=6S1/a=06GN14/pdf
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1. Micromachined inertial sensors
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