Investigation of the Reaction of Compound Formation in the Reactive Evaporation Process
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/13/i=S1/a=467/pdf
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Deposition and Properties of AlN Films Prepared by Low Pressure CVD with a Metalorganic Precursor;MRS Proceedings;1993
2. Intrinsic stress in A1N prepared by dual-ion-beam sputtering;Thin Solid Films;1987-11
3. Reflection high energy electron diffraction and X-ray studies of AlN films grown on Si(111) and Si(001) by organometallic chemical vapour deposition;Thin Solid Films;1984-12
4. Titanium nitride Schottky‐barrier contacts to GaAs;Applied Physics Letters;1983-07
5. Reactive molecular beam epitaxy;Critical Reviews in Solid State and Materials Sciences;1983-01
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