Relation between the Local Structure and the Desactivation of As+Heavily Implanted Silicon
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Published:1993-01-01
Issue:S2
Volume:32
Page:625
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Allain J. L.,Regnard J. R.,Bourret A.,Tourillon G.,Pizzini S.,Parisini A.,Armigliato A.
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
1 articles.
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1. Synchrotron Radiation;digital Encyclopedia of Applied Physics;2003-04-15