Electron Optical Properties of Microcolumn with Field Emitter-Reference-Cited by-同舟云学术

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Electron Optical Properties of Microcolumn with Field Emitter

Published:2013-03-01 Issue:3R Volume:52 Page:036603
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Neo Yoichiro,Koike Akifumi,Fujino Takahiro,Mimura Hidenori,Murata Hidekazu,Yoshida Tomoya,Nishi Takashi,Nagao Masayoshi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference24 articles.

1. Digital electrostatic electron-beam array lithography

2. Integration of a dose control circuit with a vertically aligned nanofiber field emission device

3. Electron optical column for a multicolumn, multibeam direct-write electron beam lithography system

4. Use of microfabricated cold field emitters in sub-100 nm maskless lithography

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design of an Einzel Lens with Square Cross-Section;Electronics;2021-09-23

2. High‐Performance On‐Chip Thermionic Electron Micro‐Emitter Arrays Based on Super‐Aligned Carbon Nanotube Films;Advanced Functional Materials;2019-12-13

3. Characterization of the electron emission properties of hafnium nitride field emitter arrays at elevated temperatures;Journal of Applied Physics;2017-06-21

4. Micro-fabricated Field Emitter Arrays ～For New Applications～;Journal of the Vacuum Society of Japan;2017

5. Expectation to Vacuum Nano-electronics;Journal of the Vacuum Society of Japan;2017

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