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Design of a Piezoelectric-Driven Tilt Mirror for a Fast Laser Scanner

  • Published:2012-09-01 Issue:9S2 Volume:51 Page:09MD14
  • ISSN:0021-4922
  • Container-title:Japanese Journal of Applied Physics
  • language:
  • Short-container-title:Jpn. J. Appl. Phys.

Author:

Park Jung-Ho,Lee Hu-Seung,Lee Jae-Hoon,Yun So-Nam,Ham Young-Bog,Yun Dong-Won

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A novel compact tilt stage with additive manufacturable spatial flexure mechanism driven by asymmetric stiffness;Mechanism and Machine Theory;2021-12

2. Modeling Electrostatic MEMS Actuator;2021 28th IEEE International Conference on Electronics, Circuits, and Systems (ICECS);2021-11-28

3. Development of a two-DOF piezoelectric posture alignment mechanism with low coupling based on a cross-orthogonal-axis structure;Smart Materials and Structures;2021-07-16

4. Development of a low capacitance two-axis piezoelectric tilting mirror used for optical assisted micromanipulation;Mechanical Systems and Signal Processing;2021-06

5. A systematic identification approach for biaxial piezoelectric stage with coupled Duhem-type hysteresis;COMPEL - The international journal for computation and mathematics in electrical and electronic engineering;2021-04-09
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