Invited: Growth and Doping Kinetics in Molecular Beam Epitaxy
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/16/i=S1/a=17/pdf
Cited by 27 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Surface segregation mechanism during two‐dimensional epitaxial growth: The case of dopants in Si and GaAs molecular‐beam epitaxy;Journal of Applied Physics;1989-04
2. Si incorporation probabilities and depth distributions in Ga1−xAlxAs films grown by molecular‐beam epitaxy;Journal of Applied Physics;1986-04-15
3. Molecular Beam Epitaxy And Selective MBE Deposition of GaAs Device Structures;Erosion and Growth of Solids Stimulated by Atom and Ion Beams;1986
4. Origin of oval defects in GaAs layers grown by molecular beam epitaxy;Journal of Crystal Growth;1985-10
5. Modeling of dopant incorporation, segregation, and ion/surface interaction effects during semiconductor film growth by molecular beam epitaxy and plasma-based techniques;Applications of Surface Science;1985-05
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