SURFACE ROUGHNESS OF SPUTTERED SILICON. I. SURFACE MODELING-Reference-Cited by-同舟云学术

SURFACE ROUGHNESS OF SPUTTERED SILICON. I. SURFACE MODELING

Published:2001-06-30 Issue:3 Volume:16 Page:297-313
ISSN:1042-6914
Container-title:Materials and Manufacturing Processes
language:en
Short-container-title:Materials and Manufacturing Processes

Author:

Ali M. Y.,Hung N. P.

Publisher

Informa UK Limited

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

http://www.tandfonline.com/doi/pdf/10.1081/AMP-100107376

Reference22 articles.

1. Mathematical modeling of focused ion beam microfabrication

2. Depth control of focused ion-beam milling from a numerical model of the sputter process

3. The nanoworld: chances and challenges

4. Ali, M. Y., Hung, N. P. and Yuan, S. 2000. Simulation of Micro-Injection Molding. Proceedings of the International Conference on Precision Engineering. 2000, Singapore. pp.535–540.

5. Ehrfeld, W., Lehr, H., Michel, F. and Wolf, A. 1996. Microelectro Discharge Machining as a Technology in Micromachining. Proceedings of the International Conference on Micromachining and Microfabrication Process Technology II, SPIE 2879. 1996. pp.332–337.

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Solution of maximum laser ablation depth based on dynamic energy distribution model;Materials and Manufacturing Processes;2019-09-18

2. Investigation of the local profiling of the solid surfaces using focused ion beam;AIP Conference Proceedings;2019

3. Prediction of surface topography due to finite pixel spacing in FIB milling of rectangular boxes and trenches;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11

4. A review of focused ion beam sputtering;International Journal of Precision Engineering and Manufacturing;2010-02

5. An accurate and efficient control over the present numerical model of depth of sputtering in focused ion beam milling;Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems;2009-03-01