Author:
Skorupa W.,Kögler R.,Schmalz K.
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Cited by
7 articles.
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1. Iron contamination in silicon technology;Applied Physics A: Materials Science & Processing;2000-05-01
2. Gettering in Silicon;Wiley Encyclopedia of Electrical and Electronics Engineering;1999-12-27
3. Spatial distribution of defects in ion-implanted and annealed Si: The RP/2 effect;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1998-08
4. Carbon-mediated effects in silicon and in silicon-related materials;Materials Chemistry and Physics;1996-05
5. Iron gettering and doping in silicon due to MeV carbon implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-04