Characterisation of copper thin films deposited on machinable glass–ceramic and glass by DC magnetron sputtering
Author:
Affiliation:
1. Department of Industrial EngineeringUniversity of Padovavia Gradenigo 6/aPadovaI‐35131Italy
2. Institute of Inorganic Chemistry and SurfacesNational Research CouncilCorso Stati Uniti 4PadovaI‐35127Italy
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1049/iet-smt.2012.0049
Reference22 articles.
1. Magnetron sputtering: a review of recent developments and applications
2. Electrical characterization of AlCuMo thin films prepared by DC magnetron sputtering;Birkett M.;IET Sci. Meas. Technol.,2008
3. http://www.pulleshanique.com/website/02_macor.htm accessed April 2013
4. http://accuratus.com/macorfab3.html accessed April 2013
5. Epitaxial growth of Cu on Si by magnetron sputtering;Jiang H.;J. Vac. Sci. Technol. A,1998
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Structural properties of sputter-deposited nanocrystalline Ni thin films;Materials Testing;2022-09-01
2. Increasing wear resistance of steel 18Cr2Ni4WA with magnetron sputtering Cu-based thin-layer coating;Journal of Physics: Conference Series;2020-05-01
3. Preparation and characterization of copper-coated polyester fabric pretreated with laser by magnetron sputtering;Journal of Industrial Textiles;2017-10-16
4. Influence of microstructure and surface topography on the electrical conductivity of Cu and Ag thin films obtained by magnetron sputtering;Journal of Physics: Conference Series;2017-05-04
5. Develop a Low-Temperature In-Line Sputtering System for Flexible and Thinned-Glass Substrates;Journal of Display Technology;2016-11
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3