Lithography technology for advanced devices and introduction to integrated CAD analysis for hotspot detection
Author:
Affiliation:
1. Electrical Engineering DepartmentMNNIT AllahabadAllahabadIndia
2. Electrical Engineering DepartmentNIT DelhiDelhiIndia
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering,Control and Systems Engineering
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1049/iet-cds.2015.0325
Reference64 articles.
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3. Matsuyama T. Ohmura Y. Williamson D. M.: ‘Lithographic lens: its history and evolution’.Proc. SPIE Microlithography 2006
4. Arden W. Brillouet M. Cogez P. et al.: ‘More‐than‐Moore’.White Paper Int. Roadmap Committee ITRS 2010
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