Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators-Reference-Cited by-同舟云学术

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Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators

Published:2009 Issue:1 Volume:45 Page:37
ISSN:0013-5194
Container-title:Electronics Letters
language:en
Short-container-title:Electron. Lett.

Author:

Khine L.,Palaniapan M.

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering

Link

https://digital-library.theiet.org/content/journals/10.1049/el_20092835?crawler=true&mimetype=application/pdf

Reference6 articles.

1. Micromechanical resonator with ultra-high quality factor

2. Micromechanical resonators with sub-micron capacitive gaps in 2 [micro sign]m process

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Piezoelectric Bulk Mode Disk Resonator Post-Processed for Enhanced Quality Factor Performance;Journal of Microelectromechanical Systems;2017-02

2. 18-MHz Silicon Lamé Mode Resonators With Corner and Central Anchor Architectures in a Dual-Wafer SOI Technology;Journal of Microelectromechanical Systems;2017-02

3. Compact Dual-Layer Bandpass Filter Using Novel Stepped-Impedance Resonators;Electromagnetics;2016-01-02

4. Design of compact bandpass filter with enhanced stopband characteristics;Journal of Electromagnetic Waves and Applications;2013-08-08

5. Oven-Based Thermally Tunable Aluminum Nitride Microresonators;Journal of Microelectromechanical Systems;2013-04

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