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Performance of amorphous diamond RF MEMS capacitive switch

  • Published:2004 Issue:1 Volume:40 Page:43
  • ISSN:0013-5194
  • Container-title:Electronics Letters
  • language:en
  • Short-container-title:Electron. Lett.

Author:

Webster J.R.,Dyck C.W.,Sullivan J.P.,Friedmann T.A.,Carton A.J.

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering

Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Diamond MEMS: From Classical to Quantum;Advanced Quantum Technologies;2023-08-29

2. Materials Aspects of Micro- and Nanoelectromechanical Systems;Springer Handbook of Nanotechnology;2017

3. Capacitive MEMS Switches;Encyclopedia of Nanotechnology;2016

4. Science and Technology of Ultrananocrystalline Diamond (UNCD™) Film-Based MEMS and NEMS Devices and Systems;Ultananocrystalline Diamond;2012

5. Microwave MEMS devices designed for process robustness and operational reliability;International Journal of Microwave and Wireless Technologies;2011-10
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