Photonic integration using inductively coupled argon plasma enhanced quantum well intermixing
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_20021112?crawler=true&mimetype=application/pdf
Reference8 articles.
1. Quantum well intermixing
2. Integration process for photonic integrated circuits using plasma damage induced layer intermixing
3. Plasma immersion Ar+ ion implantation induced disorder in strained InGaAsP multiple quantum wells
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2. Intermixing of InP-based quantum dots and application to micro-ring resonator wavelength-selective filter for photonic integrated devices;Applied Physics Express;2014-09-01
3. Regrowth-free high-gain InGaAsP/InP active-passive platform via ion implantation;Optics Express;2012-08-15
4. Inductively Coupled Argon Plasma-Enhanced Quantum-Well Intermixing: Cap Layer Effect and Plasma Process Influence;IEEE Journal of Quantum Electronics;2009-08
5. Argon plasma induced photoluminescence enhancement and quantum well intermixing of InGaAs/InGaAlAs multiple quantum wells;Physica B: Condensed Matter;2009-05
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