Molecular Dynamics Simulation and Experimental Investigation on the Deformation Anisotropy of Gallium Nitride Ga-Plane and N-Plane Nano-Scratching

Author:

song Jian,Zhou Hai,Xu Yameng,Jiang Wang,Zhang Chunwei

Publisher

Elsevier BV

Subject

General Earth and Planetary Sciences,General Environmental Science

Reference22 articles.

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3. Effect of polishing parameters on chemical mechanical planarization of c-plane(0001) gallium nitride surface using SiO2 and Al2O3 abrasives;K Asghar;ECS J. Solid. State. Sc,2014

4. A molecular dynamic study of nano-grinding of a monocrystalline copper-silicon substrate;Y Xu;Appl. Surf. Sci,2019

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