Author:
ligong zheng,hai zhang,Erhui Qi,Hu Haixiang,Cheng Qiang
Reference30 articles.
1. The nanometer optical component measuring machine: a new sub-nm topography measuring device for x-ray optics at BESSY;F Siewert;AIP Conf. Proc,2004
2. The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability;S G Alcock;Nuclear Instruments and Methods in Physics Research A,2010
3. Recent upgrades to the Diamond-NOM: a slope measuring profiler capable of characterizing the surface profile of large optics with subnanometre repeatability;G Simon;Proc. of SPIE,2010
4. The Optical Metrology Laboratory at Diamond: pushing the limits of nanometrology;Ioana-Theodora Nistea;Proc. of SPIE 11109,2019
5. Sub-microradian surface slope metrology with the ALS developmental long trace profiler;V V Yashchuk;Nuclear Instruments and Methods in Physics Research A,2010