Author:
Shaklya Maitreyi,Magam Sai Pratyusha,Jindal Sumit Kumar
Reference22 articles.
1. Design and fabrication of low cost micro engineered silicon pressure sensor with linearized output;M Bao;IEEE Proc. Sci. Measurement Technology,2000
2. MEMS pressure sensor-An overview of challenges in 'Technology and Packaging;S Beeby;Journal of ISSS,2004
3. A new analytical solution for diaphragm deflection and its application to a surface micromachined pressure sensor;W P Eaton;Proceedings of the International Conference on Modelling and Simulation of Microsystems,1999
4. Micromachined pressure sensors: review and recent developments;W P Eaton;Smart Material Structures,1997
5. Closed form expressions for the relationships between stress, diaphragm deflection and resistance change with pressure in silicon piezoresistive pressure sensors;H E Elgamel;Sensors and Actuators: A,1995
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