Fabrication and Performance of a Bulk 4h-Sic Mems Piezoresistive Accelerometer
Author:
Publisher
Elsevier BV
Subject
General Earth and Planetary Sciences,General Environmental Science
Reference23 articles.
1. Molecular electronic transducer-based low-frequency accelerometer fabricated with post-CMOS compatible process using droplet as sensing body;H Huang;IEEE Electron Device Lett,2013
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3. Design, fabrication and characterization of a high performance MEMS accelerometer;F Edalatfar;Proc. 2016 IEEE Sensors,2016
4. A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing;T Koga;Proc. 2020 ISISS,2020
5. Parasitic Resistance-Based High Precision Capacitive MEMS Accelerometer Phase Shift and Its Usage for Temperature Compensation;Y Liu;IEEE Sensors J,2018
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