Author:
Tanaka Taishi,Kou You,Suzuki Masato,Takahashi Tomokazu,Aoyagi Seiji
Reference38 articles.
1. A shear stress sensor for tactile sensing with the piezoresistive cantilever standing in elastic material;Kentaro Noda;Sensors and Actuators A: Physical,2006
2. 300nm-thick cantilever in PDMS for tactile sensing;K Noda;18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005
3. High-sensitivity triaxial tactile sensor with elastic microstructures pressing on piezoresistive cantilevers;Thanh - Nguyen;Sensors and Actuators A: Physical,2014
4. Piezoresistive cantilevers for nanomechanical sensing;Joan Bausells;Microelectronic Engineering,2015
5. MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever;Thanh-Vinh Nguyen;Sensors,2002