Author:
Zhang Zhongyao,Wang Xuhu,Fan Changjiang,Jin Li,Li Mengwei,Xin Chenguang
Reference36 articles.
1. Review of micromachined optical accelerometers: from mg to sub-�g;Q Lu;Opto-Electronic Advances,2021
2. An optical mems accelerometer based on a two-dimensional photonic crystal add-drop filter;A Sheikhaleh;Journal of lightwave Technology,2017
3. Fabrication and characterization of an moems gyroscope based on photonic bandgap materials;C Trigona;IEEE Transactions on Instrumentation and Measurement,2016
4. Design and analysis of a novel moems gyroscope using an electrostatic comb-drive actuator and an optical sensing system;A Sheikhaleh;IEEE Sensors Journal,2018
5. Structural design and simulation of a micro-gyroscope based on nano-grating detection;M Li;Microsystem Technologies,2019